Horizontal assemblies
Long heater bodies for production equipment, with axial zones, supports, terminals and accessible service sections.
01Semiconductor & photovoltaic
Multi-zone diffusion furnace heater assemblies
Custom ceramic-fiber insulated heater assemblies for semiconductor and photovoltaic diffusion furnaces, engineered around the customer’s process tube.
Multi-zoneaxial heating layout
Customer tubeheater surrounds process tube
Customsupports and terminals
02Overview
SYNTHE manufactures the insulated heater assembly installed around the customer’s process tube; the quartz process tube is not included. Tube outside diameter, heated and overall length, zone layout, electrical load, supports, terminals and the available installation envelope define the project.
03Product views
Large multi-zone diffusion heater construction.
Application
Semiconductor diffusion and photovoltaic thermal processing
Assembly orientation
Horizontal or vertical, made for the equipment layout
Supplied product
Ceramic fiber insulated heating assembly with installed heating elements
Tube geometry
Diameter and heated length to process-tube and equipment drawing
Temperature control
Application-specific multi-zone design
Heating system
Element pattern, terminals and lead routing to electrical specification
Insulation
Layered high-temperature ceramic fiber construction
Verification
Drawing, assembly and applicable test information defined per project
Minimum order
1 unit or sample
Packing
Standard export wooden case
Process-specific diffusion heater configurations
Heater assemblies are specified for semiconductor and photovoltaic oxidation, annealing, boron diffusion and phosphorus diffusion, as well as process-specific LPCVD and PECVD equipment. Other equipment configurations include photoresist drying, GaAs and InP crystal growth, GaN epitaxy, gallium-oxide sintering and optical-fiber sintering. Each application requires a defined process-tube relationship, atmosphere, temperature profile and electrical design; the heater is not a supplied quartz process tube.
| Design feature | Configuration |
|---|---|
| Installation orientation | Horizontal or vertical assembly |
| Resistance-wire system | FeCrAl, KANTHAL or HRE resistance-wire arrangements selected for the duty |
| Element retention | Grooves, spacers and supports coordinated to limit sag and movement |
| Zone balance | Center and end-zone lengths, power and sensor positions specified separately |
| Equipment interface | Process-tube clearance, outer casing, supports, terminals and maintenance access |
+Heating assembly construction
The heater surrounds the process tube.
Horizontal and vertical diffusion heaters use an insulated heating assembly around the process tube. Axial heating zones and physical body sections are specified separately.
- Stainless-steel casing
- Ceramic fiber insulation
- Heating elements
- Separate process tube
End zoneMain heating zoneEnd zone
Illustrative zone arrangement. The actual number, length and power of zones are defined for the equipment; casing joints do not necessarily mark electrical zone boundaries.
For standalone and supplementary heating, view cased furnace heaters ↗05Selection guide
Build the quotation zone by zone and interface by interface.
A diffusion furnace heater is made around the customer's process tube and equipment envelope rather than selected by a catalogue size. Provide the tube diameter, heated length, zone boundaries, supports, electrical circuits and available installation space.
Thermal zones and heated length
State heated and overall length, number of zones, zone boundaries, normal and maximum temperature and the target control approach. Identify end or guard zones separately from the main process region.
Mechanical integration
Provide process-tube diameter, heater clearance, orientation, supports, section joints and service access. Show how the long assembly enters, rests in and connects to the equipment.
Electrical and inspection data
Define supply voltage, phase, power, circuit grouping, sensors, terminals and lead routing. List the drawing, inspection and available test information needed with the shipment.
Semiconductor diffusion applicationMap long-body heating requirements to zones, supports and terminals.↗Photovoltaic heat-treatment applicationHeater integration, service access and repeat OEM production for photovoltaic equipment.↗Typical dimensions and interfacesDimensioned 2D diagrams for heater zones, supports, terminals, openings and installation envelopes.↗Download diffusion heater dataVertical and horizontal heater temperatures, process data and zone inputs.↗
06Custom engineering
Engineer each zone, support and electrical interface.
The project drawing records process-tube clearance, total and heated length, physical sections, zone boundaries, supports, sensors, terminals and electrical values. The quotation identifies the inspection and performance records included with the order.
- 01Process-tube diameter and heater clearance
- 02Heated length and overall assembly length
- 03Zone count and zone boundaries
- 04Element pattern and electrical loading
- 05Terminal, sensor and lead routing
- 06Insulation stack and installation interface
07Application fit
Semiconductor and photovoltaic furnace applications.
Semiconductor diffusion
Large tubular heating assemblies developed around the specified heated length, temperature-profile objective, installation envelope and independent zone controls.
Application details ↗Photovoltaic processing
Long horizontal heater assemblies with separately identified physical sections, electrical zones, supports and service access.
Application details ↗Equipment replacement
Existing drawings, tube measurements, zone lengths, terminal positions and electrical data establish the replacement boundary.
Application details ↗
ProjectProduct configuration
Diffusion heater assembly production
Long ceramic fiber insulated diffusion-furnace heater assemblies with circular hot faces, ring elements and top connection components.
Each zone has its own heated length, element pattern, sensor location, circuit and terminals.
Long heater bodies can be divided into identified sections for manufacturing, installation and service access.
In-house equipment covers material, dimensional, electrical and product-specific inspection work.
08Product FAQ
Common questions about diffusion-heater dimensions and circuits.
01Can you build a replacement diffusion furnace heater?+
Yes. Send the existing drawing, process-tube dimensions, heated length, zone lengths, electrical values, support positions and installation photographs.
02Can one heater contain several independently powered zones?+
Yes. The input sheet should identify zone count, length, element distribution, sensor position, circuit value and terminal location for each zone.
03Which records can accompany the order?+
The order can include the final production drawing, agreed dimensional and electrical inspection records, assembly photographs and packing photographs.
04Do you support both semiconductor and photovoltaic equipment?+
Yes. SYNTHE engineers heater assemblies for semiconductor diffusion and photovoltaic thermal-processing equipment.
05Is this the quartz process tube?+
No. This product is the surrounding heated assembly, also described as a diffusion heater, heating element assembly or heating module. The quartz process tube and wafer-handling parts are separate equipment components.
10Product quotation
Request pricing for multi-zone diffusion furnace heater assemblies.
Send the product dimensions, operating temperature and quantity. For a heated assembly, add the available voltage and power; a drawing or sample photo can help define the rest.